Battery-powered, Wireless MEMS Sensors for High-Sensitivity Chemical and Biological Sensing

Researchers at Oak Ridge National Laboratory (ORNL) are developing selectively coated cantilever arrays in a surface-micromachined MEMS process for very high sensitivities in chemical and biological sensing. Toward this end, we have developed a one-dimensional (1-D) 10-element microcantilever array that we have coated with gold for mercury sensing and palladium for hydrogen sensing. Ultimately we will coat each element with a different coating.

• Type: Conference
• Year: 1999
• Where: ARVLSI
• Authors: Charles L. Britton Jr., R. J. Warmack, S. F. Smith, A. L. Wintenberg, T. Thundat, G. M. Brown, W. L. Bryan, J. C. Depriest, M. N. Ericson, M. S. Emery, M. R. Moore, G. W. Turner, L. G. Clonts, R. L. Jones, T. D. Threatt, Z. Hu, James M. Rochelle
• Keywords: ARVLSI 1999, Biological Sensing, Coated Cantilever Arrays, Oak Ridge National Laboratory, VLSI