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TIM
2011

A BE-SOI MEMS for Inertial Measurement in Geophysical Applications

12 years 10 months ago
A BE-SOI MEMS for Inertial Measurement in Geophysical Applications
—In this paper, an inertial transducer developed in bulk and etch silicon-on-insulator microelectromechanical-system technology is presented. The device is suitable for low-frequency observation and could represent an interesting solution to implement low-cost monitoring systems for applications requiring a large number of monitoring sites and disposable devices. In particular, the sensor design and the technology adopted are presented here along with models describing the device operation. In addition, an experimental sensor prototype is proposed, and experimental results confirming the suitability of the proposed architecture and its consistence with the predicted behavior are discussed.
Bruno Ando, Salvatore Baglio, Gaetano L'Episcopo,
Added 15 May 2011
Updated 15 May 2011
Type Journal
Year 2011
Where TIM
Authors Bruno Ando, Salvatore Baglio, Gaetano L'Episcopo, Vincenzo Marletta, Nicolò Savalli, Carlo Trigona
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