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5

CORR
2007
Springer

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Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology

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Characterisation of the Etching Quality in Micro-Electro-Mechanical Systems by Thermal Transient Methodology

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Peter Szabó, Balázs Németh, M

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Added	13 Dec 2010
Updated	13 Dec 2010
Type	Journal
Year	2007
Where	CORR
Authors	Peter Szabó, Balázs Németh, Márta Rencz, Bernard Courtois

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