Compact 3D Profilometer with Grazing Incidence Diffraction Optics

A new type of diffraction range finder is disclosed that places the primary grating at an angle of grazing incidence relative to the receiver. The new design offers improvements over earlier prototypes in reduced package size, reduced chirp depth and a highly anamorphic behavior that provides a high profile to depth ratio. Demonstrations with transmission and reflection types of diffraction grating corroborate predictions.

• Type: Conference
• Year: 2001
• Where: 3DIM
• Authors: Tom Ditto
• Keywords: 3DIM 2001, Diffraction Grating, Diffraction Range Finder, Image Processing, Primary Grating