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TCST
2016

Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System

3 years 10 months ago
Constrained Iterative Feedback Tuning for Robust Control of a Wafer Stage System
Abstract— Iterative feedback tuning (IFT) enables the datadriven tuning of controller parameters without the explicit need for a parametric model. It is known, however, that IFT can lead to non-robust solutions. The aim of this paper is to develop an iterative feedback tuning approach with robustness constraints. A constrained IFT problem is formulated that is solved by introducing a penalty function. Essentially, the gradient estimates decompose into (a) the well-known IFT gradients and (b) the gradients with respect to this penalty function. The latter are obtained through a non-parametric model of the controlled system. This guarantees robust stability while only requiring a non-parametric model. Experimental results obtained from the motion control systems of an industrial wafer scanner confirm enhanced performance with guaranteed robustness estimates.
Marcel François Heertjes, Bart Van der Veld
Added 10 Apr 2016
Updated 10 Apr 2016
Type Journal
Year 2016
Where TCST
Authors Marcel François Heertjes, Bart Van der Velden, Tom Oomen
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