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CORR
2008
Springer

An Integrated Circuit Compatible Compact Package for Thermal Gas Flowmeters

10 years 3 months ago
An Integrated Circuit Compatible Compact Package for Thermal Gas Flowmeters
An original packaging method suitable for integrated thermal mass flow sensors is presented. The method consists in the application of a plastic transparent adapter to the chip surface. The adapter is sealed to the chip surface by means of a thermal procedure. By this approach it is possible to selectively convey the fluid flow to reduced chip areas, avoiding contact with the pads. Fabrication and testing of a very compact flow sensor is described.
P. Bruschi, V. Nurra, M. Piotto
Added 25 Dec 2010
Updated 25 Dec 2010
Type Journal
Year 2008
Where CORR
Authors P. Bruschi, V. Nurra, M. Piotto
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