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    CPHYSICS
    2007
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    Kinetic plasma simulations for three dielectric etchers

    13 years 4 months ago
    Kinetic plasma simulations for three dielectric etchers
    Download  armis.postech.ac.kr
    Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee
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    Added 13 Dec 2010
    Updated 13 Dec 2010
    Type Journal
    Year 2007
    Where CPHYSICS
    Authors Y. J. Hong, H. S. Ko, G. Y. Park, J. K. Lee
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