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CORR
2008
Springer

A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection

13 years 3 months ago
A Microcantilever-based Gas Flow Sensor for Flow Rate and Direction Detection
The purpose of this paper is to apply characteristics of residual stress that causes cantilever beams to bend for manufacturing a micro-structured gas flow sensor. This study uses a silicon wafer deposited silicon nitride layers, reassembled the gas flow sensor with four cantilever beams that perpendicular to each other and manufactured piezoresistive structure on each micro-cantilever by MEMS technologies, respectively. When the cantilever beams are formed after etching the silicon wafer, it bends up a little due to the released residual stress induced in the previous fabrication process. As air flows through the sensor upstream and downstream beam deformation was made, thus the airflow direction can be determined through comparing the resistance variation between different cantilever beams. The flow rate can also be measured by calculating the total resistance variations on the four cantilevers.
Yu-Hsiang Wang, Tzu-Han Hsueh, Rong-Hua Ma, Chia-Y
Added 09 Dec 2010
Updated 09 Dec 2010
Type Journal
Year 2008
Where CORR
Authors Yu-Hsiang Wang, Tzu-Han Hsueh, Rong-Hua Ma, Chia-Yen Lee, Lung-Ming Fu, Po-Cheng Chou, Chien-Hsiung Tsai
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