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CORR
2008
Springer

Modeling of a piezoelectric micro-scanner

10 years 3 months ago
Modeling of a piezoelectric micro-scanner
Micro-scanners have been widely used in many optical applications. The micro-scanner presented in this paper uses multimorph-type bending actuators to tilt a square plate mirror. This paper presents a complete analytical model of the piezoelectric micro-scanner. This theoretical model based on strength of material equations calculates the force generated by the multimorphs on the mirror, the profile of the structure and the angular deflection of the mirror. The proposed model, used to optimize the design of the piezoelectric silicon microscanner, is intended for further HDL integration, allowing in this way system level simulation and optimization.
A. Chaehoi, M. Begbie, D. Cornez, K. Kirk
Added 25 Dec 2010
Updated 25 Dec 2010
Type Journal
Year 2008
Where CORR
Authors A. Chaehoi, M. Begbie, D. Cornez, K. Kirk
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