A Reconfigurable Impedance Matching Network Employing RF-MEMS Switches

We propose the design of a reconfigurable impedance matching network for the lower RF frequency band, based on a developed RF-MEMS technology. The circuit is composed of RF-MEMS ohmic relays, metal-insulatormetal (MIM) capacitors and suspended spiral inductors, all integrated on a high resistivity Silicon substrate. The presented circuit is well-suited for all applications requiring adaptive impedance matching between two in principle unknown cascaded RF-circuits. The fabrication and testing of a monolithic integrated prototype in RFMEMS technology from ITC-irst is currently underway.

• Type: Journal
• Year: 2008
• Where: CORR
• Authors: Marco Bedani, F. Carozza, Roberto Gaddi, Antonio Gnudi, Benno Margesin, Flavio Giacomozzi
• Keywords: CORR 2008, Education, Lower Rf Frequency, Resistivity Silicon Substrate, RF-MEMS Ohmic Relays