Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors

An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteristics of the micromirrors by taking into account the flexural deformation of the structure is presented. The results are compared with 3D coupledfield FEM simulation.

• Type: Journal
• Year: 2007
• Where: CORR
• Authors: A. Molfese, A. Nannini, F. Pieri
• Keywords: CORR 2007, Coupledfield Fem Simulation, Education, Flexural Deformation, Thick Polysilicon Technology