Simulation based decision support for future 300mm automated material handling

Integrated factory models of semiconductor fabrication facilities allow conclusions to be drawn on the impact of a given Automated Material Handling System (AMHS) and interactions between material flow and factory performance. A generic model of a 300mm wafer fabrication facility has been built to support decisions to be made in terms of dimensioning of the potential AMHS solutions.

• Type: Conference
• Year: 2000
• Where: WSC
• Authors: Mathias Schulz, Timothy D. Stanley, Bernhard Renelt, Roland Sturm, Oliver Schwertschlager
• Keywords: Material Handling System, Modeling And Simulation, Semiconductor Fabrication Facilities, Wafer Fabrication Facility, WSC 2000