A single photon avalanche diode array fabricated in deep-submicron CMOS technology

We report the first fully integrated single photon avalanche diode array fabricated in 0.35µm CMOS technology. At 25µm, the pixel pitch achieved by this design is the smallest ever reported. Thanks to the level of miniaturization enabled by this design, we were able to build the largest single photon streak camera ever built in any technology, thus proving the scalability of the technology. Applications requiring low noise, high dynamic range, and/or picosecond timing accuracies are the prime candidates of this technology. Examples include bio-imaging at cellular and molecular level, fast optical imaging, single photon telecommunications, 3D cameras, optical rangefinders, LIDAR, and low light level imagers.

• Type: Conference
• Year: 2006
• Where: DATE
• Authors: Cristiano Niclass, Maximilian Sergio, Edoardo Charbon
• Keywords: DATE 2006, Hardware, Single Photon, Single Photon Avalanche Diode, Single Photon Streak