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CORR
2008
Springer

Solving functional reliability issue for an optical electrostatic switch

8 years 1 months ago
Solving functional reliability issue for an optical electrostatic switch
In this paper, we report the advantage of using AC actuating signal for driving MEMS actuators instead of DC voltages. The study is based upon micro mirror devices used in digital mode for optical switching operation. When the pull-in effect is used, charge injection occurs when the micro mirror is maintained in the deflected position. To avoid this effect, a geometrical solution is to realize grounded landing electrodes which are electrostatically separated from the control electrodes. Another solution is the use of AC signal which eliminates charge injection particularly if a bipolar signal is used. Long term experiments have demonstrated the reliability of such a signal command to avoid injection of electric charges.
Henri Camon, C. Ganibal, N. Rapahoz, M. Trzmiel, C
Added 25 Dec 2010
Updated 25 Dec 2010
Type Journal
Year 2008
Where CORR
Authors Henri Camon, C. Ganibal, N. Rapahoz, M. Trzmiel, C. Pisella, C. Martinez, K. Gilbert, S. Valette
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