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DAC
1997
ACM

Structured Design of Microelectromechanical Systems

11 years 9 months ago
Structured Design of Microelectromechanical Systems
In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is compatible with standard IC design is needed. A graphical-based schematic, or structural, view is presented as a geometrically intuitive way to represent MEMS as a set of interconnected lumpedparameter elements. An initial library focuses on suspendedMEMS technology from which inertial sensors and other mechanical mechanisms can be designed. The schematic representation has a simulation interface enabling the designer to simulate the design at the component level. Synthesis of MEMS cells for common topologies provides the system designer with rapid, optimized component layout and associated macro-models. A synthesis module is developed for the popular folded-flexure micromechanical resonator topology. The algorithm minimizes a combination of total layout area and voltage applied to the electromechanical actu...
Tamal Mukherjee, Gary K. Fedder
Added 06 Aug 2010
Updated 06 Aug 2010
Type Conference
Year 1997
Where DAC
Authors Tamal Mukherjee, Gary K. Fedder
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