A Table-Based Time-Domain Simulation Method for Oversampled Microelectromechanical Systems

This paper describes a table-based behavioral modeling method and an efficient transient simulation method for oversampled MEMS systems. A system is represented by a set of coupled ordinary differential equations (ODEs) numerically described by table-based macromodels. Cubic spline interpolation is used to evaluate the model functions. The instant settling approximation and the explicit ODE solver are employed to enable efficient transient simulation. These methods are used to simulate a delta-sigma MEMS accelerometer and demonstrate high simulation efficiency.

• Type: Conference
• Year: 2000
• Where: BMAS
• Authors: Jiangfeng Wu, L. Richard Carley
• Keywords: BMAS 2000, Efficient Transient Simulation, Modelling And Simulation, Table-based Behavioral Modeling, Transient Simulation Method