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2000

Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environmen

9 years 20 days ago
Understanding the impact of equipment and process changes with a heterogeneous semiconductor manufacturing simulation environmen
Simulation models are useful to predict and understand the impact of changes to a manufacturing system. Typical factory simulation models include the parts being manufactured in the factory and the people and resources processing and handling the parts. However, these models do not include equipment or process details, which can affect operational performance such as cycle time and inventory. Separate models are used to evaluate processes and equipment. Thus, it is difficult to evaluate the operational impact of equipment or process changes. However, this information could help factory managers and manufacturing process engineers make better decisions when changing processes or selecting equipment configurations. This paper describes a heterogeneous simulation environment for understanding how equipment and process changes affect the performance of a wafer fabrication facility. This integrated tool incorporates response surface models that describe process behavior, operational and op...
Jeffrey W. Herrmann, Brian F. Conaghan, Laurent He
Added 01 Nov 2010
Updated 01 Nov 2010
Type Conference
Year 2000
Where WSC
Authors Jeffrey W. Herrmann, Brian F. Conaghan, Laurent Henn-Lecordier, Praveen Mellacheruvu, Manh-Quan Nguyen, Gary W. Rubloff, Rock Z. Shi
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