Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...
The paper presents a database-based method to reduce the development time and project lead-time for large discreteevent simulation models of entire factories. The database used to...
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundre...
Despite that simulation possesses an establish background and offers tremendous promise for designing and analyzing complex production systems, manufacturing industry has been les...
This tutorial explains the basics of linear regression metamodels—especially low-order polynomials—and the corresponding statistical designs—namely, fractional factorial des...