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WSC
2007
13 years 6 months ago
Automatic generation of simulation models for semiconductor manufacturing
This article gives an overview of a framework for automatically generating large-scale simulation models from a domain specific problem definition data schema, here semiconductor ...
Ralph Mueller, Christos Alexopoulos, Leon F. McGin...
WSC
1998
13 years 5 months ago
Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
Simulation modeling provides an effective and powerful approach for capturing and analyzing complex manufacturing systems. More and more decisions are based on computer generated ...
Nirupama Nayani, Mansooreh Mollaghasemi
ATAL
2005
Springer
13 years 10 months ago
An agent-based approach for managing symbiotic simulation of semiconductor assembly and test operation
The rapid changing business environment of high-tech asset intensive enterprises such as semiconductor manufacturing constantly drives production managers to look for better solut...
Malcolm Yoke-Hean Low, Kong Wei Lye, Peter Lenderm...
CCE
2006
13 years 4 months ago
An object-oriented framework for modular chemical process simulation with semiconductor processing applications
This paper discusses the development of a set of object-oriented modular simulation tools for solving lumped and spatially distributed models generated from chemical process desig...
Jing Chen, Raymond A. Adomaitis