4 search results - page 1 / 1 » Capacity Analysis of Automated Material Handling Systems in ... |
WSC
2004
13 years 6 months ago
2004
A critical aspect of semiconductor manufacturing is the design and analysis of material handling and production control polices to optimize fab performance. As wafer sizes have in...
WSC
2008
13 years 7 months ago
2008
This paper proposes an analytical model useful in the design of conveyor-based Automated Material Handling Systems (AMHS) to support semiconductor manufacturing. The objective is ...
WSC
2007
13 years 7 months ago
2007
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundre...
WSC
2004
13 years 6 months ago
2004
Wafers in a 300-mm semiconductor fabrication facility are transported throughout the factory in carriers called front opening unified pods (FOUPs). Two standard capacities of FOUP...