2 search results - page 1 / 1 » Copper Planar Microcoils Applied to Magnetic Actuation |
CORR
2008
Springer
13 years 4 months ago
2008
Springer
Recent advances in microtechnology allow realization of planar microcoils. These components are integrated in MEMS as magnetic sensor or actuator. In the latter case, it is necess...
CORR
2008
Springer
13 years 4 months ago
2008
Springer
A novel technique for the fabrication of micro electromagnetic actuators was proposed and a prototype was designed and fabricated in this study. The constituent parts of the design...