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WSC
1998
13 years 6 months ago
Validation and Verification of the Simulation Model of a Photolithography Process in Semiconductor Manufacturing
Simulation modeling provides an effective and powerful approach for capturing and analyzing complex manufacturing systems. More and more decisions are based on computer generated ...
Nirupama Nayani, Mansooreh Mollaghasemi
WSC
2007
13 years 7 months ago
Automatic generation of simulation models for semiconductor manufacturing
This article gives an overview of a framework for automatically generating large-scale simulation models from a domain specific problem definition data schema, here semiconductor ...
Ralph Mueller, Christos Alexopoulos, Leon F. McGin...
DAGM
2004
Springer
13 years 10 months ago
Using Pattern Recognition for Self-Localization in Semiconductor Manufacturing Systems
In this paper we present a new method for self-localization on wafers using geometric hashing. The proposed technique is robust to image changes induced by process variations, as o...
Michael Lifshits, Roman Goldenberg, Ehud Rivlin, M...
WSC
2004
13 years 6 months ago
Simulation-Based Advanced WIP Management and Control in Semiconductor Manufacturing
We develop a hierarchical distributed production planning and control methodology, called DISCS, for a large and unstable semiconductor manufacturing process. The upper layer of D...
Kazuo Miyashita, Tsukasa Okazaki, Hirofumi Matsuo
WSC
2007
13 years 7 months ago
Simulation results and formalism for global-local scheduling in semiconductor manufacturing facilities
This article deals with an approach for managing scheduling in semiconductor manufacturing facilities. The proposed approach ensures consistency between global and local schedulin...
Mickaël Bureau, Stéphane Dauzèr...