5 search results - page 1 / 1 » Hierarchical distributed simulation for 300mm wafer fab |
WSC
2007
13 years 6 months ago
2007
Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300mm wafer fabs, although these benefits have been hard to achieve in ...
WSC
2004
13 years 5 months ago
2004
WSC
2004
13 years 5 months ago
2004
Distributed simulation promises a range of benefits and opportunities, especially for modeling large-scale complex systems, such as wafer fabs. However, as with many promising tec...
WSC
2007
13 years 6 months ago
2007
Semiconductor wafer fabrication facilities (wafer fabs) are among the most complex production facilities. A large product variety, hundreds of processing steps per product, hundre...
WSC
2004
13 years 5 months ago
2004
We develop a hierarchical distributed production planning and control methodology, called DISCS, for a large and unstable semiconductor manufacturing process. The upper layer of D...