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WSC
2004
13 years 6 months ago
Improving the Performance of Dispatching Rules in Semiconductor Manufacturing by Iterative Simulation
In this paper, we consider semiconductor manufacturing processes that can be characterized by a diverse product mix, heterogeneous parallel machines, sequence-dependent setup time...
Lars Mönch, Jens Zimmermann
WSC
2008
13 years 7 months ago
Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing
Scheduling is one of the key factors for semiconductor fabrication productivity. Objectives like lot cycle time and throughput must be optimized to push the technological developm...
Andreas Klemmt, Sven Horn, Gerald Weigert, Thomas ...