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TASE
2011
IEEE
8 years 5 months ago
A Totally Decoupled Piezo-Driven XYZ Flexure Parallel Micropositioning Stage for Micro/Nanomanipulation
—This paper reports the design and development processes of a totally decoupled flexure-based XYZ parallel-kinematics micropositioning stage with piezoelectric actuation. The un...
Yangmin Li, Qingsong Xu
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