12 search results - page 1 / 3 » Simulation analysis of cluster tool operations in wafer fabr... |
WSC
2008
13 years 6 months ago
2008
Cluster tools have been one of the proposed alternatives to improve operations performance in semiconductor fabrication. The benefits include high yield throughput, less contamina...
WSC
2008
13 years 6 months ago
2008
Cluster tools, which combine several single-wafer processing modules with wafer handling robots in a closed environment, have been increasingly used for most wafer fabrication pro...
WSC
2000
13 years 5 months ago
2000
Designing semiconductor cluster tool systems is a complicated task due to the nature of automatic operations and various configurations of modules and task response priorities of ...
WSC
2008
13 years 6 months ago
2008
Semiconductor industry is capital intensive and competitive, and thus efficiently utilizing resources to provide products and services is essential for maintaining competitive adv...
WSC
2001
13 years 5 months ago
2001
As the semiconductor industry moves into the next millennium, companies increasingly will be faced with production obstacles that impede their ability to remain competitive. Effec...