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WSC
2008
13 years 7 months ago
Simulation analysis of semiconductor manufacturing with small lot size and batch tool replacements
Long cycle times in semiconductor manufacuring represent an increasing challenge for the industry and lead to a growing need of break-through approaches to reduce it. Small lot si...
Kilian Schmidt, Oliver Rose
TASE
2011
IEEE
13 years 9 days ago
Multiclass Flow Line Models of Semiconductor Manufacturing Equipment for Fab-Level Simulation
—For multiclass flow line models, we identify a class of service times that allow a decomposition of the system into subsets of servers called channels. In each channel, the cus...
James R. Morrison