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WSC
2008
13 years 7 months ago
Simulations-based and solver-based optimization approaches for batch processes in semiconductor manufacturing
Scheduling is one of the key factors for semiconductor fabrication productivity. Objectives like lot cycle time and throughput must be optimized to push the technological developm...
Andreas Klemmt, Sven Horn, Gerald Weigert, Thomas ...
ANOR
2008
90views more  ANOR 2008»
13 years 5 months ago
Multiple orders per job batch scheduling with incompatible jobs
: The growth in demand for semiconductors has been accompanied by intense competition between semiconductor manufacturers to satisfy customer on-time delivery needs. This paper is ...
Vishnu Erramilli, Scott J. Mason