3273 search results - page 1 / 655 » Structured Design of Microelectromechanical Systems |
DAC
1997
ACM
13 years 8 months ago
1997
ACM
In order to efficiently design complex microelectromechanical systems (MEMS) having large numbers of multi-domain components, a hierarchically structured design approach that is ...
ISCAS
2006
IEEE
2006
IEEE
Microelectromechanical systems in 3D SOI-CMOS: sensing electronics embedded in mechanical structures
13 years 10 months ago
— We discuss the design of CMOS MEMS in a 3D SOI-CMOS technology. We present layout architectures, preliminary mechanics modeling using finite element analysis and release proce...
GECCO
2006
Springer
13 years 8 months ago
2006
Springer
An automated design synthesis system based on a multi-objective genetic algorithm (MOGA) has been developed for the optimization of surface-micromachined MEMS devices. A hierarchi...
CORR
2007
Springer
13 years 4 months ago
2007
Springer
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices i...
ITC
2003
IEEE
13 years 9 months ago
2003
IEEE
This summary of selected microelectromechanical systems (MEMS) processes guides the reader through a wide variety of fabrication techniques used to make micromechanical structures...