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ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is appli...
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q...
ICMENS
2005
IEEE
13 years 10 months ago
2005
IEEE
Abstract— In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. T...