Sciweavers

10 search results - page 1 / 2
» icmens 2005
Sort
View
ICMENS
2005
IEEE
134views Hardware» more  ICMENS 2005»
13 years 10 months ago
Cyclo-Olefin Polymer Direct Bonding Using low Temperature Plasma Activation Bonding
Jun Mizuno, Sharon Farrens, Viorel Dragoi, Thomas ...
ICMENS
2005
IEEE
115views Hardware» more  ICMENS 2005»
13 years 10 months ago
Pulse-actuated micromechanical resonator using digital Kalman observer
The paper presents a digital oscillating loop for a MEMS resonator in which the instantaneous resonator position is estimated on-line with a Kalman observer. The approach is appli...
Éric Colinet, Dimitri Galayko, Jér&o...
ICMENS
2005
IEEE
115views Hardware» more  ICMENS 2005»
13 years 10 months ago
LIGA Cavity Resonator for K-Band Applications
A 2-mm deep microwave cavity resonator is proposed for LIGA micro-fabrication. LIGA provides highly vertical and optically smooth sidewalls, leading to potentially high quality (Q...
Zhen Ma, David M. Klymyshyn, Sven Achenbach
ICMENS
2005
IEEE
120views Hardware» more  ICMENS 2005»
13 years 10 months ago
Nonlinear Dynamics in Nanomechanical Oscillators
Abstract— In the present work we investigate nonlinear dynamics in a nanomechanical doubly clamped beam made of PdAu fabricated using bulk nanomachining and e-beam lithography. T...
Stav Zaitsev, Ronen Almog, Oleg Shtempluck, Eyal B...