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CORR
2007
Springer
64views Education» more  CORR 2007»
13 years 4 months ago
Process Issues for a Multi-Layer Microelectrofluidic Platform
S.-H. Ng, Z.-F. Wang, R.-T. Tjeung, N. De Rooij
CORR
2007
Springer
158views Education» more  CORR 2007»
13 years 4 months ago
Model of Electrostatic Actuated Deformable Mirror Using Strongly Coupled Electro-Mechanical Finite Element
The aim of this paper is to deal with multi-physics simulation of micro-electro-mechanical systems (MEMS) based on an advanced numerical methodology. MEMS are very small devices i...
V. Rochus, J.-C. Golinval, C. Louis, C. Mendez, I....
CORR
2007
Springer
47views Education» more  CORR 2007»
13 years 4 months ago
Reduced-Order Modelling of the Bending of an Array of Torsional Micromirrors
An array of micromirrors for beam steering optical switching has been designed in a thick polysilicon technology. A novel semi-analytical method to calculate the static characteri...
A. Molfese, A. Nannini, F. Pieri
CORR
2007
Springer
111views Education» more  CORR 2007»
13 years 4 months ago
Micro-Ball Lens Array Fabrication in Photoresist Using Ptfe Hydrophobic Effect
This paper presents a simple method to fabricate micro-ball lens and its array. The key technology is to use the hydrophobic characteristics of polyterafluoroethylene (PTFE) subst...
Ruey-Fang Shyu, Hsiharng Yang, Wen-Ren Tsai, Jhy-C...
CORR
2007
Springer
147views Education» more  CORR 2007»
13 years 4 months ago
Characterization of Flexible RF Microcoil Dedicated to Surface Mri
In Magnetic Resonance Imaging (MRI), to achieve sufficient Signal to Noise Ratio (SNR), the electrical performance of the RF coil is critical. We developed a device (microcoil) ba...
Marion Woytasik, J.-C. Ginefri, J.-S. Raynaud, M. ...
CORR
2007
Springer
66views Education» more  CORR 2007»
13 years 4 months ago
Miniaturized Fluorescence Excitation Platform with Optical Fiber for Bio-Detection Chips
This paper presents a new research study on the platform fabrication of fluorescence bio-detection chip with an optical fiber transmission. Anisotropic wet etching on (100) silico...
Hsiharng Yang, Chung-Tze Lee
CORR
2007
Springer
91views Education» more  CORR 2007»
13 years 4 months ago
Au-SN Flip-Chip Solder Bump for Microelectronic and Optoelectronic Applications
As an alternative to the time-consuming solder pre-forms and pastes currently used, a co-electroplating method of eutectic Au-Sn alloy was used in this study. Using a coelectropla...
Jeong-Won Yoon, Hyun-Suk Chun, Ja-Myeong Koo, Seun...
CORR
2007
Springer
105views Education» more  CORR 2007»
13 years 4 months ago
Design and Modeling of a Mems-Based Valveless Pump Driven by an Electromagnetic Force
A novel valveless micro impedance pump is proposed and analyzed in this study. The pump is constructed of a upper glass plate, two glass tubes, a PDMS (polydimethylsilxane) diaphr...
Hsien-Tsung Chang, Chia-Yen Lee, Chih-Yung Wen