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ASPDAC
2007
ACM
123views Hardware» more  ASPDAC 2007»
13 years 8 months ago
Coupling-aware Dummy Metal Insertion for Lithography
As integrated circuits manufacturing technology is advancing into 65nm and 45nm nodes, extensive resolution enhancement techniques (RETs) are needed to correctly manufacture a chip...
Liang Deng, Martin D. F. Wong, Kai-Yuan Chao, Hua ...