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CORR
2007
Springer
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13 years 4 months ago
Design and Modeling of a Mems-Based Valveless Pump Driven by an Electromagnetic Force
A novel valveless micro impedance pump is proposed and analyzed in this study. The pump is constructed of a upper glass plate, two glass tubes, a PDMS (polydimethylsilxane) diaphr...
Hsien-Tsung Chang, Chia-Yen Lee, Chih-Yung Wen