ICIP
2010
IEEE
13 years 2 months ago
2010
IEEE
Optical lithography is a critical step in the semiconductor manufacturing process, and one key problem is the design of the photomask for a particular circuit pattern, given the o...
ICIP
2008
IEEE
14 years 6 months ago
2008
IEEE
The continual shrinkage of minimum feature size in integrated circuit (IC) fabrication incurs more and more serious distortion in the optical lithography process, generating circu...