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WCE
2007
13 years 5 months ago
Microfabrication in Foturan Photosensitive Glass Using Focused Ion Beam
— The fabrication of nano-dimensional features in the photoetchable glass FoturanTM , using focused ion beam technology has been characterized. To date, most microfabrication in ...
Carl J. Anthony, P. T. Docker, Philip D. Prewett, ...