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    Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities
    13 years 7 months ago
    Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities
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    In this paper, multiple orders per job type formation and release strategies are described for semiconductor wafer fabrication facilities (wafer fabs). Different orders are groupe...
    Jens Zimmermann, Scott J. Mason, John W. Fowler, L...
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