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ICCAD
2008
IEEE
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ICCAD 2008
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Layout decomposition for double patterning lithography
15 years 11 months ago
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vlsicad.ucsd.edu
In double patterning lithography (DPL) layout decomposition for 45nm and below process nodes, two features must be assigned opposite colors (corresponding to different exposures)...
Andrew B. Kahng, Chul-Hong Park, Xu Xu, Hailong Ya...
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