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CORR
2008
Springer
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13 years 4 months ago
Enhanced Sensing Characteristics in MEMS-based Formaldehyde Gas Sensor
In this study, the proposed sensor integrates a sensing layer, a heating device, and electrodes on the substrate. The micro heater is integrated in the sensor to provide instantan...
Yu-Hsiang Wang, C.-C. Hsiao, Chia-Yen Lee, Rong-Hu...