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    2008
    IEEE
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    Pull-in control during nanometric positioning by near field position sensing
    13 years 6 months ago
    Pull-in control during nanometric positioning by near field position sensing
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    This paper deals with the pull-in control and the nanopositioning of an electrostatically actuated NEMS (Nano Electromechanical System) squeezed between two forces. It is shown tha...
    Sylvain Blanvillain, Alina Voda, Gildas Besan&cced...
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