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    2008
    147views Modeling And Simulation» more  WSC 2008»
    Automated generation and parameterization of throughput models for semiconductor tools
    13 years 7 months ago
    Automated generation and parameterization of throughput models for semiconductor tools
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    Cluster tools play an important role in modern semiconductor fabs. Due to their complexity in configuration and their varying material flow, the creation of accurate throughput mo...
    Jan Lange, Kilian Schmidt, Roy Borner, Oliver Rose
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