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    ICCAD
    2006
    IEEE
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    From micro to nano: MEMS as an interface to the nano world
    14 years 1 months ago
    From micro to nano: MEMS as an interface to the nano world
    Download  www.cecs.uci.edu
    Leveraging conventional microsystems technology, MEMS has become the technology of choice for a wide range of applications including inertial sensors for automotive, games, and co...
    Bernhard E. Boser
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