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    GLVLSI
    2009
    IEEE
    128views VLSI» more  GLVLSI 2009»
    Impact of lithography-friendly circuit layout
    13 years 8 months ago
    Impact of lithography-friendly circuit layout
    Download  dropzone.tamu.edu
    Current lithography techniques use a light wavelength of 193nm to print sub-65nm features. This introduces process variations which cause mismatches between desired and actual waf...
    Pratik J. Shah, Jiang Hu
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