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CORR
2007
Springer
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13 years 4 months ago
Energy Conversion Using New Thermoelectric Generator
During recent years, microelectronics helped to develop complex and varied technologies. It appears that many of these technologies can be applied successfully to realize Seebeck ...
Guillaume Savelli, Marc Plissonnier, Jacqueline Ba...
WSC
2007
13 years 7 months ago
An analysis of tool capabilities in the photolithography area of an ASIC fab
Photolithography is generally regarded as the most constraining element in semiconductor manufacturing. This is primarily attributable to the high capital investment and extensive...
P. J. Byrne, Cathal Heavey, Kamil Erkan Kabak