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DAC
1989
ACM
9 years 7 months ago
An Efficient Finite Element Method for Submicron IC Capacitance Extraction
We present an accurate and efficient method for extraction of parasitic capacitances in submicron integrated circuits. The method uses a 3-D finite element model in which the cond...
N. P. van der Meijs, Arjan J. van Genderen
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