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    DATE
    2006
    IEEE
    111views Hardware» more  DATE 2006»
    Extraction of defect density and size distributions from wafer sort test results
    13 years 11 months ago
    Extraction of defect density and size distributions from wafer sort test results
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    Defect density and defect size distributions (DDSDs) are key parameters used in IC yield loss predictions. Traditionally, memories and specialized test structures have been used t...
    Jeffrey E. Nelson, Thomas Zanon, Rao Desineni, Jas...
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