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CORR
2007
Springer
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13 years 4 months ago
Influence of Micro-Cantilever Geometry and Gap on Pull-in Voltage
In this paper, we study the behaviour of a microcantilever beam under electrostatic actuation using finite difference method. This problem has a lot of applications in MEMS based ...
W. Faris, H. Mohammed, M. M. Abdalla, C.-H. Ling