CORR
2008
Springer
13 years 5 months ago
2008
Springer
This study investigates a high Q-factor spiral inductor fabricated by the CMOS (complementary metal oxide semiconductor) process and a post-process. The spiral inductor is manufact...
CORR
2008
Springer
13 years 5 months ago
2008
Springer
In this paper, deep sub-micron CMOS process compatible high Q on chip spiral inductors with air gap structure were designed and fabricated. In the design the electromagnetic solve...