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    ISCAS
    2003
    IEEE
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    Micromachined piezoresistive tactile sensor array fabricated by bulk-etched MUMPs process
    13 years 10 months ago
    Micromachined piezoresistive tactile sensor array fabricated by bulk-etched MUMPs process
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    The design, fabrication and testing of a 5 5 micromachined tactile sensor array for the detection of an extremely small force (micrometer-Newton range) has been discussed. An anis...
    Tanom Lomas, A. Tuantranont, F. Cheevasuvit
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