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    2011
    269views Distributed And Parallel Com...» more  IAJIT 2011»
    Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors
    12 years 11 months ago
    Evaluation for diaphragm's deflection for touch mode MEMS pressure sensors
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    : In this paper, an analytical and simulation solution for touch mode Micro-electromechanical systems pressure sensor operating in harsh environment is proposed. The principle of t...
    Yadollah Hezarjaribi, Mohd Hamidon, Roslina Mohd S...
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