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WSC
2008
13 years 6 months ago
An optimization framework for waferfab performance enhancement
A typical wafer fab requires numerous decisions for daily operations. Even small decisions on system configurations may have significant impact on the overall fab performance. One...
Daniel Noack, Boon-Ping Gan, Peter Lendermann, Oli...
WSC
2008
13 years 6 months ago
Determining an appropriate number of FOUPs in semiconductor wafer fabrication facilities
In this paper, multiple orders per job type formation and release strategies are described for semiconductor wafer fabrication facilities (wafer fabs). Different orders are groupe...
Jens Zimmermann, Scott J. Mason, John W. Fowler, L...
WSC
2007
13 years 6 months ago
Hierarchical distributed simulation for 300mm wafer fab
Distributed simulation promises benefits in large-scale simulations, such as in high fidelity simulation of 300mm wafer fabs, although these benefits have been hard to achieve in ...
Sheng Xu, Leon F. McGinnis